PUR-Therm gas delivery heaters from CAS are designed to heat critical carrier gases and process gases. Manufactured to meet the industry’s stringent purity standards, PUR-Therm gives OEMs and fabricators a more efficient, more accurate method of heating chamber gases, without sacrificing purity.
CAS PUR-Therm gas delivery heaters utilize the benefits of cast-in components to deliver more heat at lower wattages. Compared to other heaters, PUR-Therm uses less energy to achieve the same Delta-T. PUR-Therm heaters comply with a comprehensive array of industry standards for High Purity and Ultra High Purity. Heated gases are isolated in high purity 316 seamless stainless steel flow-tube, never contacting the heating elements or any other heater components
CAS PUR-Therm gas delivery heaters are ideal for applications such as carrier gas heating, process gas heating, and air & nitrogen heating for wafer drying. Not only do PUR-Therm heaters deliver more accurate temperature control compared to other heaters, they also eliminate the messy wires & control mechanisms associated with flexible gasline heaters. Compatible with most standard controls, PUR-Therm gas delivery heaters can be easily installed into gas cabinets or integrated ‘in-line’ at any point along the gas stream.
